Beilstein J. Nanotechnol.2023,14, 478–484, doi:10.3762/bjnano.14.38
, Nanjing University, Nanjing 210093, China 10.3762/bjnano.14.38 Abstract A mid-infrared (MIR) focusinggratingcoupler (FGC) with a single circular arc element (CAE) in the front of the gratings based on a germanium-on-silicon (Ge-on-Si) platform is designed and demonstrated. It can be used equivalently
couplers requiring secondary etching, the proposed full-etch grating coupler structure can reduce the complexity of fabrication and can provide a prospective platform for MIR photonic integration and photonic biosensor detection.
Keywords: circular arc element; focusinggratingcoupler; germanium-on
technological process. Therefore, a focusinggratingcoupler (FGC) with a simple fabrication process and high coupling efficiency is urgently needed.
In this paper, a MIR FGC with a single circular arc element (CAE) based on Ge-on-Si is demonstrated and simulated. The proposed MIR FGC consists of a section of
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Figure 1:
(a) Tilted view and (b) cross-sectional view of the proposed MIR grating coupler. (c) Schematic dia...